陶瓷产品部件（部分）CERAMIC PARTS

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 1 氧化铝管 0200－20495

2 CERAMIC RESISTOR NEAR NET SHAPED Φ17.5*Φ7.9*158.7 0200-35525

3 INSULATOR FEEDTHRU 300MM SIP ENCORE TA(N) 0200-02121

4 Lift pin weigh 0200-17674

5 Lift pin pusher 0200-00454

6 Φ18.03*Φ1.75*46.48 0200-00453

7 LIFT PIN GUIDE BOTTOM NH ALUMINA Φ11.86xΦ2.32x44.5 0200-03749

8 LIFT PIN GUIDE TOP NH 5MM ALUMINA Φ7.7xΦ2.88x46.78 0200-07014

9 WASHER,INSULATING,CERAMIC Φ17.65xΦ12.19x8.26 0200-10263 REV003

10 MAHA SP/CERAMIC INSULATOR Φ59.6xΦ40.12x40.1 3240202001

11 Weight Φ22.4xΦ3.81x11.5 0200-07974

12 绝缘子 Φ19.05xΦ2.413x14.22 0200-28165

13 Bottom Purgebaffle Φ82.55xΦ77.7x180.98 0200-18880

14 Lift Pin Guide Top NH 5MM Alumina Φ11.86x68.11 0200-07014/0200-03749

15 SLEEVE JUNCTION SIN，DXZ Φ50.29xΦ44.2x79.5 0200-00296

16 pin guide Φ9.47xΦ3.25x24.13 0200-29077

17 氧化铝块/片 Φ201.15*1.04 0200-02220

18 盘 0200-20521

19 陶瓷块 0200-07782

20 CHILLER PLATE 2XP,COOLING PEDESTAL,SI Φ312.4*11.45 0200-11027

21 ESC INSLATOR Φ306.6*19.1 0200-00374-002

22 陶瓷圆片 Φ57.4x6.35 0200-35334（原产料号材料为石英）

23 CHILLER PLATE 1XP,COOLING PEDESTAL,SICONI Φ312.4x11.45 0200-25993 REV02

24 bland lid Φ544.32x25.7 0200-09145

25 Blank Lid Φ544.32x25.7 0200-03598

26 CAP CERAMIC 0.44 IN WAVE WASHE Φ11.18x0.76 0200-05307

27 绝缘子 Φ18.1x5.08 0200-05795

28 CLAMP,FLAT COIL,300MM E2 ICE MATCU 88.9x28.45x7.62 0200-01300

29 INSULATOR INNER，BELLOWS 8101HEATER 96.266x26.162x6.43 0200-00503

30 SPACER INSULATOR 2FFT 55KI Φ120.5x6.35 0200-72942

31 氧化铝环 Φ279.4*Φ227.8*7.75 0200-18081

32 RING,CAPTURE C-ESC,SNNF,200MM Φ240*Φ207*14 0200-00250

33 氧化铝环 355.56*10.23 0200-00690

34 氧化铝环 Φ318.3Φ222.5*6.35 0200-09072

35 LIFT RING.FIXED LIFT PIN. 200MM PRODUCE Φ155.7*Φ120.14*2.54 0200-02576

36 ISOLATOR SILANE PUMPING RING PRODUCER 200MM Φ278.9*Φ236.6*93.9 0200-39361

37 collar Φ251.714*Φ197.92*14.35 0200－18109

38 氧化铝环 0200-20492

39 氧化铝环 0200-07582

40 氧化铝环 Φ524*Φ470*15.9 0200-07514

41 陶瓷环 Φ368.5*Φ350.5*31.2 0200-01427

42 陶瓷环 Φ318.4*Φ222.1*6.5 0200-09072

43 陶瓷环 Φ210*Φ160*4 0200-09027

44 PUMPING LINER FSG-TEOS PRODUCER 200MM Φ272.29*Φ247.65*88.9 0200-00969

45 ISOLATOR PUMPING PLATE DXZ GECO Φ301.9*Φ254.25*38.35 0200-10144

46 COLLAR 200MM SNNF SML FLT UL TIMA HDPCVD 0200-18109-S

47 INSERT RING NM,200MM,NOTCH() Φ207.9*Φ196.27*5.817 0200-01509

48 陶瓷环 Φ279*Φ212*4 0200-08200

49 陶瓷环 Φ257.71*14.35 0200-18109

50 陶瓷环 Φ14.83*12.95 0200-20315-01

51 陶瓷环 Φ266*Φ210*3 0200-08334

52 陶瓷环 Φ194.26 *Φ238*4.83 0200-01155

53 陶瓷环 Φ427*Φ330*55 0200-02421

54 lift hoop for Fix lift pin Φ267*Φ210*3 0200-08334

55 ISOLATOR BKM1 ENHANCED TXZ  φ255*φ305*38 0200-00234

56 陶瓷压环 186.8*318*6.4mm 0200-10193

57 DEPOSITION RING 300MM ESC Ф360*Ф294*5.5mm 0200-03337

58 环 Φ316.3*Φ281.2*47.1 0200-361050

59 6寸陶瓷环 0200-09224

60 陶瓷环single ring 0200-39152-001

61 陶瓷focus ring 0200-39140

62 LABYRINTH FEEDTHRU COLL SUPORT VECTRA-IMP φ20.193*φ9.271*19.05 0200-20217 

63 " COVER 8""PEDESTAL,B101 HTR

CERAMIC,VECTRA-IMP" φ236.7*φ186.79*11.6 0200-20285

64 "COVER RING 8""B101 PROCESSES

10.75"" OD" φ273.05*φ219.075*27.94 0200-20331

65 RING CAPTURE 195MM SNNF CERAMIC DPS 0200-00247

66 COVER PLATE CHILLER SICONI PRECLEAN 300MM 0200-07496-03

67 SHIELD TOP CERAMIC TXZ 300MM 0200-36399

68 COVER 300MM PEDESTAL B101 HTR IMP 0200-76050

69 PUMPING RING CERAMIC ENLARGED HOLE Low K 300MM PRODUCER 0200-03403

70 陶瓷环 0200-00332

71 陶瓷环 0200-06867

72 COVER RING ULTIMA 300MM 0200-05216 (0400-99736吉姆西）

73 RING 8 INCH PEDESTAL B101 HEATER SLOPED CERAMIC  0200-02836

74 RING,DEPOSITION,PVD W V2,CLEANCOAT,A 0200-06870

75 RING COVER 300MM B101(CERAMIC) TiN HEATER IMP 0200-76057

76 P2 Cover,ceramic,pumping channel 0200-10650

77 Pumping ring,ceramic,C shaped mid p 0200-35842

78 Pumping ring,ceramic,top piece 0200-35843

79 Pumping ring,ceramic,C-SHAPE 0200-36415

80 Pumping ring,ceramic,bottom piece 0200-39274

81 Pumping ring CERAMIC TOP 0200-36417

82 COVER CERAMIC PUMPING CHANNEL 0200-36418

83 ISO PUMPING RING MIDDLE 200MM 0200-00316

84 ISO PUMPING RING BOTTOM 200MM 0200-00317

85 INSERT RING CHAMBER CERAMIC DxZ 0200-39324

86 ceramic ring 0200-00278

87 ISO PUMPING RING TOP 200MM 0200-00402

88 pumping ring 0200-36416

89 RING OUTER 200MM WxZ+ NCSR 0200-00622-001

90 Screw cover Φ419.1*Φ385.32*9.53 0200-00933

91 Ceramic lid assembly Φ546*Φ35.6*25.7 0200-02935

92 Single ring 0200-03388

93 LINER CERAMIC BOTTOM PRODUCER SE 0200-02397

94 陶瓷环 0200-00624

95 陶瓷环 0200-07363

96 RING,ISOLATOR SOURCE ADAPTOR，SELF-A Φ523.88*Φ444.5*15.88 0200-12581-02

97 INSULATOR, 300MM SOURCE ADAPTOR,CERAMIC Φ523.75*Φ469.77*15.88 0200-07442

98 RING SHADOW 200MM WXZ PLUS NCSR 1.5MM EE Φ265.54*Φ197*8.97 0200-00621-006(1)

99 HSR SHIELD TOP CERAMIC 300MM TXZ Φ436.52*Φ398.07*16.26 0200-06508-03

100 HSR CHAMBER INSERT CVD 3OOMM TXZ Φ428.45*Φ332.56*53.9 0200-06509-03

101 HSR CHAMBER INSERT CVD 300MM TXZ Φ436.37*Φ377.95*54.41 0200-06510-05

102 ISOLATOR FSG-TEOS PRODUCER 200MM 0200-00968-001

103 RING DEPOSITION CU COIL EXTENDED TRENCH DESC 300MM Φ342.9*Φ294.49*9.88 0200-06073-05

104 LINER CERAMIC TOP PRODUCER SE Φ365.76*Φ336.3*41.34 0200-02395-003

105 CU dep ring Φ357.99*Φ294.49*9.88 0200-04017

106 AL dep ring Φ362.2*Φ294.49*5.84 0200-07492

107 LINER CERAMIC BOTTOM PRODUCER SE APF Φ364*Φ336.3*28.96 0200-03414 REV 003

108 ESC COVER Φ340.87*Φ298.2*64.21 0200-05664

COLLAR ESC 300MM,MIN.CONTACT HDPCVD 0200-00511

663 ceramic liner Φ358.48*Φ336.5*31.75 0200-03954

664 TTN CHAMBER ONLY-VACUUM SIDE Φ114.24*Φ85.7*20.93 0200-05041

665 ISOLATOR，CERAMIC 300MM PROUCER Φ428.45*Φ342.90*31.267 0200-04235

669 LINER,CERAMIC TOP,LOW K PRODUCER SE Φ365.76xΦ343.92x41.4 0200-02972-001

670 LINER,CERAMIC MIDDLE,LOW K PRODUCER SE Φ365.76xΦ343.92x25.91 0200-02973-001

671 LINER,CERAMIC BOTTOM,LOW K PRODUCER SE Φ365.76xΦ343.92x28.96 0200-02974-002

672 PUMPING LINER, TOP, SIH4,PRODUCER SE Φ365.76xΦ336.3x41.35 0200-04654-04

675 RING,SINGLE 195MM SEMI NOTCH CERAMIC,DPS CHAMBER Φ273.05*Φ195.66*40.38 0200-10377-003

676 TOP LINER Φ365.76*Φ336.3*41.4 0200-02414

679 PUMPING RING CERAMIC C-CHANNEL,SIDE 1 300MM PRODUCER SE Φ436.75xΦ366.4x41.4 0200-02407

680 PUMPING RING CERAMIC C-CHANNEL,SIDE 2 300MM PRODUCER SE Φ436.75xΦ366.4x41.4 0200-02408

686 INSULATOR,1.480",300MM SOURCE,SHIELD,RF PVD Φ481.53*Φ448.77*37.59 0200-07884 REV04

687 LINER, CERAMIC Middle, PRODUCER SE Φ365.76xΦ336.3x25.91 0200-02396-001

697 DEPOSITION RING Φ362.2xΦ294.49x7.37 0200-06863

704 LINER CERAMIC,SiN DXZ,GECO Φ317.65xΦ285.14x16.59 0200-10160 REV002

705 SHIELD PUMPING INSERT,SiN,DXZ Φ317.27xΦ266.7x25.68 0200-10164 REV A

709 RING,CAPTURE C-ESC,SNNF,200MM Φ240*Φ207*14 0200-00250(英诺赛科专供)

714 12吋EMAX 腔体内环 Φ333.45xΦ297.69x3.56 0200-03555L

715 12吋EMAX 腔体上环 Φ392xΦ332.11x4.42 0200-03559L

716 DOME UP ATM,OM-100 Φ267.64xΦ197x16.75 0200-35084

719 ISOLATOR, PPM, AL-OXIDE, LARGE ELECTRODE, PRODUCER G-GT Φ482.61xΦ438.15x10.16 0200-14851

720 ISOLATOR, PPM, AL-OXIDE, LARGE ELECTRODE, SR, PRODUCER G-GT Φ482.61xΦ389.89x10.16 0200-15179

728 C-CHANNEL SIDE 1 PRODUCER SE APF Φ436.69xΦ366.46x41.4 0200-03406 REV004

729 C-CHANNEL SIDE 2 PRODUCER SE APF Φ436.69xΦ366.46x41.4 0200-03407 REV004

730 陶瓷环 Φ482.6xΦ392.43x29.34 0200-21232 REV04

731 陶瓷环 Φ403.73xΦ368.3x24 0200-19648 REV03

732 DEPOSITION RING AL W/ ESC, 300mm Φ369.32xΦ294.77x12.47 0200-02677

740 RING COVER 300MM B101(CERAMIC) TiN HEATER IMP Φ362.46xΦ319.15x24.13 0200-07443

743 RING,FINGER LIFT 300MM PRODUCER Φ266.7xΦ209.55x35.56 0200-01991

744 CHAMBER INSERT 300MM Φ436.37xΦ377.95x54.41 0200-00531

745 SINGLE RING CERAMIC .O9 HT 25 RECESS DP Φ384.05xΦ298.45x14.86 0200-04701

748 COVER，CLAMPING RING，150MM CERAMIC Φ256.54xΦ176.28x4.57 0200-09735 REV B

749 SHIELD，150MM PEDESTAL，AL，FINGER Φ205.61xΦ141.12x3.962 0200-09759 REV02

750 RING，CLAMP，CER，FLAT，FINGER，AL，150MM，95H Φ256.54xΦ145.8x31.75 0200-09757

755 DPS Metal Focus Ring Φ282.9xΦ195.58x47.37 0200-00137 REV05(改）

756 Top Liner APEX CIP Φ383.28xΦ350.52x40.33 0200-08090

757 RING SHADOW NCSR 1.5MM EE 300MM CWXZ Φ341.58xΦ297x8.97 0200-00771 REV 007

758 RING OUTER NCSR 300MM CWxZ Φ373.56xΦ354x10.49 0200-00772 REV 005

761 陶瓷环 Φ365.76xΦ343.92x41.4 0200-06758

762 陶瓷环 Φ365.76xΦ336.76x29.34 0200-15205

763 陶瓷环 Φ365.76xΦ336.3x25.8 0200-14255

764 陶瓷环 Φ428.5xΦ350.52x31.37 0200-04470

765 AMAT Blue Rock Heater Isolator Φ362.78xΦ87.25x22.2 0200-25007

766 Liner Ceramic APF Bottom Middle Right Φ363.98xΦ338.07x53.34 0200-09105

768 DEPOSITION RING 300MM BESC CERAMIC WITH BEAD BLAST Φ358.01xΦ294.77x8.79 0200-02916

769 Dep Ring Φ352.93xΦ294.49x9.89 0200-15404

771 RING CAPTURE CERAMIC MODIFY Φ253.49xΦ196.6x11.56 0200-35323

780 Radiation Shield Φ363.22xΦ101.09x2.54 0200-21960

781 COLLAR MIN. CONTACT 200mm SNNT HDP-CVD,ULTIMA Φ251.71xΦ197.92x14.35 0200-18095 REV002

786 Liner Ceramic APF Bottom Middle Left Φ363.98xΦ338.07x53.34 0200-09104

787 Outer pumping plate CIP kits Φ406.4xΦ340.36x9.4 0200-19783

788 Inner pumping plate CIP kits Φ363.98xΦ338.07x53.36 0200-19793

794 RING,PURGE Φ235.25xΦ200.86x13.21 0200-00354

797 ceramic lid Φ546*Φ35.6*25.7 0200-06405 REV04

798 SINGLE RING CERAMIC .50 HEIGHT 300MM HTD ESC Φ384.05xΦ298.5x22.66 0200-04877 REV04

799 陶瓷环 Φ358.39xΦ336.3x34.93 0200-03954 REV06（华力微6厂专用）

805 陶瓷环 Φ318.26xΦ172.21x6.53 0200-10195 REV.A

807 陶瓷沉积环 Φ369.32xΦ294.49x8.76 0200-01080

823 PLATE EDGE COVER，PRODUCER DLK-CVD Φ241.81xΦ211.58x22.48 0200-00281

825 DEPOSITION RING WITH ANTI-ROTATION Cu BESC Φ279.02xΦ225.81x18.25 0200-00242

826 CHAMBER INSERT 200mm TxZ CIP Φ317.35xΦ266.7x46.1 0200-00261

827 ISOLATOR CERAMIC 300MM PRODUCER Φ428.45xΦ342.9x31.27 0200-00482

828 HOOP,CERAMIC,WAFER LIFT,WXZ 300MM Φ266.7xΦ215.9x12.7 0200-01532

835 LINER CERAMIC,SiN DXZ,GECO Φ317xΦ285x16.59 0200-03719

836 SHIELD PUMPING INSERT SIN,DXZ GECO Φ317.27xΦ266.7x25.68 0200-03718

837 DEP RING，300MM SIP TA CLEANCOAT，BARE Φ342.9xΦ294.77x7.8 0200-02985

838 DEPOSITION RING 300MM AL W/ESC Φ369.32xΦ294.59x6.86 0200-02790

839 LINER,COMMON,BD BLOK,LOWK,200MM PRODUCER Φ272.29xΦ254x88.9 0200-01393

840 INSULATOR 300MM SOURCE ADAPTOR,CERAMIC Φ523.75xΦ469.77x15.88 0200-01326

842 ISOLATOR CERAMIC WXZ EC Φ301.752xΦ267.614x29.44 0200-00710

843 LINER CERAMIC BOTTOM。SACVD 300MM PRODUCER Φ182.88xΦ168.15x28.96 0200-00668

844 ISOLATOR BLOK DXZ 200MM Φ307.19xΦ256.92x45.34 0200-00501

845 Top liner Φ359.31xΦ346.46x21.79 0200-10961

851 Insulator Φ428.5xΦ335.15x48.01 0200-10960

856 氧化铝棒 0200-40156

864 PIN WAFER LIFT HEATER Φ8*90 0200-09933

865 陶瓷针 Ceramic Lift Lock Pin,PM Φ1.2*7 0200-06702-01 625-02611-033-P01

866 陶瓷T型杆 Φ6*37 0200-03269

867 陶瓷T型杆 Φ6*47 0200-06840-01

868 陶瓷T型杆 Φ6.2*152.4 0200-01798

879 PIN,LIFT,HEATER,WXZ Φ6*Φ3*77 0200-09716

888 陶瓷PIN针 Φ6.03*Φ46.28 0200-18053

895 PIN COVER RF SCREW VECTRA IMP 0200-20216

896 PIN WEIGHT 300MM HDPCVD 0200-00576-002

897 LIFT PIN 170 FIXED FLOATING 300MM PRODUCER SE 0200-03314-004

903 PIN,LOCKING,SHADOW RING INSERT 0200-14576

904 SCREW LID LINERT X Z 0200-35611

913 PIN COVER SIP II 200MM 0200-02042-004

914 PIN CAPTIVE SCREW COVER 0200-02139

919 PIN LIFT HEATER DxZ 0200-10284-001

935 LIFT PIN CERAMIC NOTCHED Φ1.557*90.48 0200-07474

939 LIFT PIN LUMMINA CLAMPED CH-AB 300MM END Φ9.63x72.9 0200-05140

950 PIN,WAFER LIFT 300M Φ11.63x101.6 0200-07414

954 LIFT PIN,DSA Φ6.35x101.6 0200-04293

955 DALI SR LIFT PIN Φ6.35x123.67 0200-05876

962 Ceramic Bolt φ9x11.19.3 EE050200A

968 LIFT PIN ,CH Φ6.35x69.93 0200-06131

971 Lift pin side(长） Φ3.18x53.34 0200-21986/0200-14280

972 Lift pin side(短） Φ3.18x46.23 0200-21987/0200-14281

973 PIN Φ6.35x46.99 0200-08020

974 PIN，LIFT CERAMIC，300MM TXZ SST HEATER Φ5.82x103.84 0200-02398

975 pin (UV) Φ6.35x64.64 0200-06110

976 LIFT PIN CERAMIC 300MM,HDPCVD Φ1.567x90.475 0200-18100 REV004

977 Lift Pin Φ1.55x96.53 0200-04101

984 陶瓷管 Φ3.81x12.7 0200-06422

989 LIFT PIN Φ3.18x85.1 0200-24876

991 PING Φ3.18x47.24 0200-28141

992 lift pin Φ3.96x89.41 0200-05912

993 NOZZLE, ALN, 1.76L X .014DIA, 103% FLOW Φ10.41xΦ0.341x44.7 0200-05916

1005 LIFT PIN Φ6.35x46.99 0200-06840（改制）

1010 PIN HTR EDGE RING TAN Φ4.42x12.62 0200-03698 Rev 001

1011 LIFT PIN，FIXED LIFT PIN，200MM/300MM PRODUCER Φ6.35x40.64 0200-02575 Rev 001

1020 LIFT PIN .149 DIA TRIANGULAR Φ6.35x38.1 0200-03901

1021 PIN WAFER LIFE,300MM Φ11.633x101.6 0200-03584

1031 216.9*96.6*3.15 手臂 216.9*96.6*3.15 0200-00834

1033 ULTIMA HDP Side nozzle 0200-18093

1034 氧化铝异形件 0200-36666

1035 氧化铝DOME 0200-18062

1036 氧化铝DOME 0200-01006 REV 006

1070 氧化铝异形件 0200-35290

1071 氧化铝异形件 0200-35291

1072 氧化铝异形件 0200-02117

1073 氧化铝异形件 0200-02116

1074 氧化铝异形件 Φ381*Φ344.93*106.93 0200-10324

1075 氧化铝异形件focus ring 0200-00137

1086 腔体密封环 0200-35287

1087 氧化铝异形件 0200-36373

1089 氧化铝异形件 0200-39133

1120 异形件 0200-20494

1121 陶瓷件 0200-01196

1122 陶瓷件 0200-01197

1137 陶瓷手臂 0200-00834

1156 陶瓷异形件 0200-09384/PIN,WAFER LIFT 150MM,UNIVER

1157 陶瓷异形件 0200-09035/PIN,WAFERLIFT 6

1177 NOZZLE 4HOLE,60DEG.,BAFFLEULTIMA 1 HDP-CVD  Φ52.07*44.704 0200-01009

1178 SPACER PIN WXZ+HEATER Φ5.9*Φ4.2*17.9 0200-00353-S

1180 DOME,CERAMIC 2.75 DIA WINDOW DPS CHAMBER Φ381*106.943 0200-35956

1181 PLATE FINGER LIFT RING 200MM PRODUCER 189.94*155.7*29.72 0200-36649

1183 LABYRINTH,RIGID COIL SUPPORT Φ19*Φ8*21 0200-20175 

1184 LABYRINTH Φ15*Φ9*19 0200-20217

1185 CAP COIL SUPPORT RIGID,IN Φ29*Φ24*12 0200-20170

1186 HOUSING,DOUBLE RF CONNECTOR 71*65*22 0200-20215

1187 INSULATOR COIL SUPPORT RIGID Φ24*Φ8*6 0200-20169

1188 陶瓷DOME Φ260Φ215*40 0200-18090 Rev。002 301-464-047

1191 陶瓷异形件 Φ24*Φ10*29 0200-39135

1192 陶瓷异形件 Φ18*Φ10*46 0200-35296

1193 陶瓷异形件 Φ25*Φ17*46 0200-35295

1194 陶瓷异形件 Φ63*Φ26*40 0200-39296

1195 陶瓷异形件 Φ15*Φ8*12 0200-00468

1196 HOUSING,DOUBLE RF CONN,300MM SIP ENCOR 150.37*105.37*33.27 0200-07448

1198 陶瓷柱  Φ17*Φ3.5*16 0200-06842-01

1235 HOUSING,DOUBLE RF CONNECTOR 69.55*106.045 0200-07277

1248 CUP,COIL SUPPORT 300MM SIP ENCORE φ28*φ24*10 0200-02145

1249 INJECTOR，GAS 12 HOLES,020 φ18.5*φ8*30(圆) 0200-01844

1250 INJECTOR，GAS 12 HOLES,020 φ18.5*φ8*30（圆缺口） 0200-01845

1251 INJECTOR，GAS 300MM EMAX B φ15*φ12*19 0200-01967

1281 陶瓷大碗 0200-05590

1282 LINER,JUNCTION.SIN,DXZ GECO 0200-10157

1283 PLATE,EDGE COVER,DXZ GECO 0200-10169

1303 DOME TOP FEED 300MM HDPCVD ULTINA PLUS 0200-01347

1308 指顶环 0200-33649

1322 陶瓷锁扣 0200-00299

1324 BLADE 200MM WXZ AMJ CERAMIC  0200-01568

1327 氧化铝异形件focus ring 0200-00137

1332 MANIFOLD CERAMIC RPS PRODUCER SE 0200-01766 Rev.001

1335 INSERT DOUBLE RF CONN 300MM SIP ENCOVER TA(N) 0200-02115

1336 DOME CERAMIC，DPS CHAMBER 0200-39137

1339 INSULATOR RECEPTACLE RIGID SUPPORT VECTRA-IMP ICE 0200-20492

1343 COVER DOUBLE RF CONNECTOR VECTRA-IMP 0200-20210-001

1344 Gas Nozzle 0200-04814

1346 陶瓷盘 0200-07417

1351 HOUSING 105.4*82.4*25.4 0200-00466

1356 Pin Pedestal Alignment Ceramic 300MM PC Φ9.53x20.32 0200-01904

1357 Rest Button Short 300MM VECTRA IMP Φ14.86*Φ7.2*9.98 0200-20440

1364 CERAMIC BLADE 300MM 330.98*170.3*9.78 0200-00991

1365 BLADE 300MM 417.96*150.88*5.79 0200-06112

1366 BLADE 300MM PRODUCER GT 354.03*139.7*3.8 0200-08347

1401 HDP HP robot blade 96.52*217.6*3.81 0200-40126 REV P5

1421 DOME,E-DTCU, DPS plus Φ381*106.93 0200-10324(英诺赛科专供)

1422 RING,FOCUS 195MM SEMI NTCH N Φ283.64*62 0200-00137(英诺赛科专供)

1434 SHIELD,tool,ISOLATOR,SR,PRODUCER G-GT R218.32x10.16 0200-14770

1435 Weight Φ28.96x14.22 0200-22484

1437 Ring Φ48.26xΦ25.4x25.4 0200-04406

1438 LIFTING PIN 200MM 50.8x36.83x7.62 0200-09071(改）

1439 ISOLATOR FEOL SMALL RF 300MM Φ157.48xΦ92.58x65.1 0200-07415

1440 SPACER PIN,EDGE RING,SICONI 300MM 12.6x7.8x15.11 0200-07418 REV02

1441 manifold,ceramic,rpsII，producer se 66.55x45.72x88.9 0200-02469

1442 MANIFOLD BLOCK PRODUCER SE 66.8x45.72x12.7 0200-05464 REV02

1446 KEEPER,NOTCHED LIFT PIN, PECVD,300MM Φ4x2.908 0200-14283 REV05

1447 Cover ring Φ384.05x15.3 0200-03200

1448 Capture ring Φ331.22x8.64 0200-03317

1449 cover ring Φ384.05x15.3 0200-09095

1450 capture ring Φ331.22x8.64 0200-09096

1451 Hub Center Dual Gas Side Feed 300MM DPS 32 Φ92.8x26.54 0200-08585

1452 Nozzle Insert AG1000 Solid 1.3L 300MM DP Φ67.18x35.05 0200-06396

1460 CERAMIC,SUPPORT CENTER,PEDESTAL,300MM Φ12.2x12.7 0200-20441

1473 Weight Lift Pin 300mm WC Heater Φ19.05xΦ3.56x15.75 0200-09641

1479 Gas nozzle(Cr) Φ15.8x18.8 0200-03599

1483 绝缘子 Φ25.4x13.46x9.91 0200-22733

1523 SINGLE GAS FEED, 300MM, ADPNA01 HD Φ83.82x99.06x18.04 0200-10861 REV 02

1565 "BRACKER,FLAT COIL

300MM E2 ICE MATCH" 88.9x54.1x31.8 0200-01299

1566 LINERJUNCTIONSIN，DXZ 57.95x50.546x16.586 0200-03936

1567 "ISOLATOR,ENHANCED,

PUMPING LID,200MM TXZ" Φ306.98xΦ227.08x45.01 0200-03453

1568 PLATE EDGE COVER，DXZ GECO Φ261.62xΦ215.9x25.4 0200-03712

1569 SHIELD L-SUPPORT PUMPING INSERT GECO Φ317.094xΦ266.7x14.224 0200-03710

1570 ISOLATOR BLOK DXZ 200MM Φ381x106.93 0200-00175

1612 PIN TXZ HEATER SINGLE TAPER,CERAMIC Φ6.35x77.6 0200-01798

1614 BLADE 300MM PRODUCER 354*140*3.8 0200-17144

1615 DEPOSITION RING 300MM ESC Ф360*Ф294*5.5mm 0200-03337

1623 LIFT PIN，FIXED LIFT PIN，200MM/300MM PRODUCER Φ6.35x40.64 0200-02575

1624 LIFT PIN(3mm) Φ6.35x46.99 0200-06840

1625 AL dep ring Φ362.2*Φ294.49*5.84 0200-07492

1626 ceramic dome window Φ69.85x3.18 0200-35957

1628 lift pin Φ3.73*99.67 0200-27287

1629 pin weight Φ18*10 0200-07974

1631 ring 200mm oxide Φ267.64xΦ196.42x15.75 0200-00411/0200-10446/0200-36696

1635 DOME, 14 ID HDPCVD,REV 3 0200-18062

1636 DPS Metal Focus Ring Φ282.9xΦ195.58x47.37 0200-00137 REV05

1637 RING,CAPTURE C-ESC,SNNF,200MM Φ240*Φ207*14 0200-00250

1640 DEPOSITION RING 300MM ESC Ф360*Ф294*5.5mm 0200-03337

1641 LIFT PIN,1.8MM Φ1.8*39.9 615-00427-022-P01

1642LIFT PIN 2.0MM FLAT END,CERAMIC φ2x39.9 615-00427-031-P01

1643 灯管电极陶瓷屏蔽件B-2＿ALNPM 180×37 10150-000615 B