金属件（部分）Mental Parts

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1 TUBE,GAS,DUAL VAPORI Φ3.18*Φ2.05*204 E17014832

2 SCREW,FILAMENT,NO HE Φ4.7*Φ2.42*25.4 E17179690

3 PLATE,ARC CHAMBER,TO 104.9*50.8*5 E17014691

4 Side PLATE ARC CHAMBER 92.1*25.4*6.22 E17036921

5 Side End PLATE,TOP 31.4*25.4*3.18 E17037064

6 Side End PLATE,BOTTOM 31.4*25.4*3.18 E17037065

7 PLATE,BOTTOM,CHAMBER 98*57.15*25.4 E17063190

8 不锈钢密封垫片（CA33A0A2001X）MSA-043-215 OEM STGWI14005S

9 Pedestal Φ295.91*9.4 0020-19258

10 SHIELD LOWER 300mm PCXT/RPC Φ454.03*36.5 0040-86514-REV 003

11 Shutter Disk Al-1_APALC Φ302.13*7.51 10115-007891-B

12 CU SHUTTER DISK Φ302.13*7.51 10120-004993-A

13 不锈钢垫片 MSA-043-315

14 DISK, SHUTTER, B101, CENTER PIN, RPG CHBR, 300MM Φ296.42*6.6 0020-47196

15 PLATE, RETAINER ALUMINUM Φ44.5*2.5 0021-04258 REV 03

16 PLATE, RETAINER, REV 5.0 VECTRA IMP 43x32.3x2.05 0021-07485

17 Φ279.4*23.9 22754BMT1022

18 PEDESTAL 300MM IMP B101,HEATER W/CENTER BUTTON Φ305.18*8.9 0021-22224

19 PLATE,BAFFLE(L3-4) SP2..D2-G8 475*240*9.67 1A10-372248-12

20 PLATE,BAFFLE(S3-4) SP2..D2-G8 475*245*9.67 1A10-372249-12

21 CLAMP RING PLASMA SHIELD Φ349.05*Φ331.67*26.54 1006940

22 cover ring Φ273.4*Φ216*30.78 PMT21-07-002

23 Inner Shielding,Manipulator(小) Φ15.88Φ3.98*6.35 E17002860

24 Outer Shielding,Manipulator(大) Φ25.3Φ3.98*6.35 E17002870

25 Shield Inner 300mm Pcii/rpc Φ494.3Φ417.33*66.03 0021-19342-REV 004

26 Lower Shield Φ455.93Φ347.98*303.53 10110-646347-B

27 Middle Shield Φ483.95Φ397.07*155.03 10110-661068-A

28 Top Shield Φ484.84Φ428.39*66.57 10110-661069-B

29 Cover Ring Φ373.41Φ319.23*28 10115-002142-C

30 Single-piece Shield_APAlC Φ488.79Φ360*104.3 10115-008605A

31 COVER RING 304_ALC Φ385.13Φ311.32*27.68 10115-023266B

32 金属上盖 Φ436.12Φ359.79*9.4 0021-28012 REV02

33 金属下盖 Φ436.12Φ348.87*25.4 0040-79071 REV03

34 190MM T-S, IMP, 300MM Φ482.4Φ350.8*227.4 0021-12063

35 金属基座 Φ49Φ29*27 3810-330709-11

36 Filament feed through Φ12*24 SOKS01-2007

37 reflector supporter Φ9*26 SOKS01-2008

38 M10 HEAD BOLT-S(M6X10L) Φ10x16 DRY-H1-PM-3100-007

39 SCR,PERF PLATE VENTED WXZ 300MM Φ7.9x24 0021-02730

40 SCREW BLOCKER WXZ HAST Φ8.1x13.5 0020-86016

41 内六角平头螺钉4-40 UNCx1/8" 4-40 UNCx(1/8") 19-386944-00

42 filament feedthrough Φ20.98*258.72 170008020

43 M3X20 SHCS SST M3X20 内六角圆柱头螺钉 GB/T 70.1 - 2008 44S0377

44 螺丝/SCREW #6-32X1/2FL/H/HEX/SC/M VENT 6-32X1/2内六角沉头真空排气螺钉 6971-0006-6208

45 不锈钢制螺丝/SCREW#10-32 X5/8FL/H/HEX/SC/M 10-32X5/8内六角沉头螺钉 4400690

46 SHUTTER YTTRIA COATED R228.6*47.96 1006941

47 Reflector 1-1 33*26.4*2 SOK30-2034

48 Reflector(4) Φ26*7.6 SOK30-2123

49 Side coil assy, w/ clamping,Hesper Φ496.32*130.67 540-00186-000-P01

50 ASSY,SPD VAT GATE VLV SLIDE 257.5X327.5X20.8 22-126824-00